Author: Juan L. Palma, Alejandro Pereira, Raquel Álvaro, José Miguel García-Martín and Juan Escrig
Beilstein J. Nanotechnol. 2018
Abstract
Magnetic thin films with periodic arrays of holes, so-called antidot arrays, can be used in several applications such as magnetoplasmonics, sensors, magnonics and spintronic devices. With suitable dimensions, the holes allow for engineering the magnetic properties. In this work, the new technique called AFIR (from ALD + FIB + reduction) to manufacture antidot arrays in magnetic oxides is presented, and as a proof of concept, magnetite antidots are studied.