Al2O3 and HfO2 Atomic Layers Deposited in Single and Multilayer Configurations on Titanium and on Stainless Steel for Biomedical Applications
Author: Ivan Spajić, Ehsan Rahimi, Maria Lekka, Ruben Offoiach, Lorenzo Fedrizzi and Ingrid Milošev
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Abstract:
Thin films of alumina and hafnia were prepared by atomic layer deposition, with the aim of investigating the use of such films in biomedical applications. Films were deposited on commercially pure titanium and on medical stainless steel…
