ISO Standards for Surface Chemical Analysis Vocabulary (ISO 18115:2013)

The surface chemical analysis vocabulary provides the definitions for some 900 surface chemical analysis terms in the two ISO International Standards:

1) ISO18115-1:2013(E) – Surface chemical analysis – Vocabulary –Part 1,
General terms and terms used in spectroscopy

2) ISO18115-2:2013(E) – Surface chemical analysis – Vocabulary – Part 2,
Terms used in scanning-probe microscopy

These documents, available from ISO (International Standards Organization in Geneva) or your National Standards Body, cover the terms used in surface analysis spectroscopies such as Auger electron spectroscopy (AES), secondary ion mass spectrometry (SIMS), X-ray photoelectron spectroscopy (XPS) and many similar methods as well as in the scanned probe microscopies (SPM) such as atomic force microscopy (AFM), scanning near-field optical microscopy (SNOM), scanning tunnelling microscopy (STM) and many similar methods.

The PDF files for these ISOs can be downloaded at the ISO portal.

Before you use this link, please read through and follow the copyright document below.


© ISO 2017
The reproduction of the terms and definitions contained in these International Standards is permitted in teaching manuals, instruction booklets, technical publications and journals for strictly educational or implementation purposes.
The conditions for reproduction are: that no modifications are made to the terms and definitions; that such reproduction is not permitted for dictionaries or similar publications offered for sale; and that the International Standard is referenced as the source document.
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Permission has been granted by ISO for public access to ISO 18115-1 and ISO 18115-2 for educational and implementation purposes through eight approved websites at the National Physical Laboratory (UK), the American Vacuum Society (USA), the Environmental Molecular Sciences Laboratory (USA), the Surface Analysis Society of Japan (Japan), the National Institute of Advanced Industrial Science and Technology (Japan), the Bundesanstalt fur Materialforshung und -prufung (Germany), the National Metrology Institute of Germany (Germany) and the Spanish Vacuum Society (Spain).


 Revision history of ISO 18115 – Surface chemical analysis – Vocabulary


The initial vocabulary, ISO 18115:2001, contained 350 terms for Surface Chemical Analysis, covering AES, XPS, SIMS, sputtering, depth profiling and associated areas. In the first amendment, ISO 18115:2001Amd 1 in 2006, five abbreviations and 71 terms were added, many covering concepts in glow discharge analysis. The second amendment, ISO 18115:2001Amd 2 in 2007, contained a further 87 terms for secondary ion mass spectrometry, elastic peak electron spectroscopy and reflected electron energy loss spectroscopy, 76 acronyms for scanned probes, 33 definitions of scanned probe techniques, six terms for contact mechanics and 147 terms for concepts in scanned probe analysis. Additionally, term 5.24, attenuation length, in ISO 18115:2001, had an added sentence clarifying NOTE 2, and term 5.25, effective attenuation length, is revised to make it more general. To accommodate further new terms and a few clarifications, in 2010, this standard was revised into the two new ISO documents; Parts 1 and 2, where Part 1 contains entries relevant to the spectroscopies, and Part 2 to the scanned probes. Amendments to these new documents, containing over 100 further terms, were approved in 2013.